{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3513, "q": 2.076, "mu": 1.796, "epsilonL": 7.764e-05, "Eth": 13.61}, "E_min": 13.61, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.61	0.0	
16.32	0.0002534	
19.58	0.001244	
23.48	0.003637	
28.15	0.008555	
33.76	0.01771	
40.49	0.03342	
48.55	0.05817	
58.22	0.0937	
69.82	0.1398	
83.73	0.1935	
100.4	0.2504	
120.4	0.3063	
144.4	0.3585	
173.2	0.4061	
207.7	0.4492	
249.1	0.4887	
298.7	0.5252	
358.2	0.5594	
429.5	0.5918	
515.1	0.6224	
617.7	0.6515	
740.8	0.6788	
888.4	0.7044	
1065.0	0.728	
1278.0	0.7492	
1532.0	0.768	
1837.0	0.7838	
2203.0	0.7964	
2642.0	0.8055	
3169.0	0.8108	
3800.0	0.8119	
4557.0	0.8087	
5465.0	0.801	
6554.0	0.7887	
7860.0	0.7718	
9425.0	0.7506	
11300.0	0.7252	
13560.0	0.6962	
16260.0	0.6639	
19490.0	0.6289	
23380.0	0.5919	
28040.0	0.5536	
33620.0	0.5146	
40320.0	0.4756	
48350.0	0.437	
57980.0	0.3994	
69530.0	0.3632	
83390.0	0.3287	
-----