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Plasma-Surface Interaction Data Set 199

Sputtering of ³He⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ³He⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	14.22	0.0
	17.03	0.0002885
	20.41	0.002027
	24.45	0.007191
	29.3	0.01838
	35.11	0.03693
	42.06	0.06038
	50.4	0.08351
	60.38	0.1025
	72.35	0.1168
	86.69	0.1273
	103.9	0.1352
	124.4	0.1413
	149.1	0.1462
	178.7	0.1501
	214.1	0.1532
	256.5	0.1555
	307.3	0.157
	368.2	0.1577
	441.1	0.1575
	528.6	0.1565
	633.3	0.1546
	758.8	0.1518
	909.1	0.1481
	1089.0	0.1437
	1305.0	0.1384
	1564.0	0.1325
	1874.0	0.126
	2245.0	0.1191
	2690.0	0.1118
	3223.0	0.1043
	3861.0	0.09678
	4627.0	0.08925
	5543.0	0.08186
	6642.0	0.0747
	7958.0	0.06782
	9535.0	0.0613
	11420.0	0.05517
	13690.0	0.04946
	16400.0	0.04417
	19650.0	0.03931
	23540.0	0.03487
	28210.0	0.03084
	33800.0	0.0272
	40500.0	0.02393
	48520.0	0.021
	58140.0	0.01839
	69660.0	0.01607
	83460.0	0.01402

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.267
q = 0.4034
mu = 2.272
epsilonL = 0.0007297
Eth = 14.22

Fit range

E = 14.22 – 100000