{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.267, "q": 0.4034, "mu": 2.272, "epsilonL": 0.0007297, "Eth": 14.22}, "E_min": 14.22, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.22	0.0	
17.03	0.0002885	
20.41	0.002027	
24.45	0.007191	
29.3	0.01838	
35.11	0.03693	
42.06	0.06038	
50.4	0.08351	
60.38	0.1025	
72.35	0.1168	
86.69	0.1273	
103.9	0.1352	
124.4	0.1413	
149.1	0.1462	
178.7	0.1501	
214.1	0.1532	
256.5	0.1555	
307.3	0.157	
368.2	0.1577	
441.1	0.1575	
528.6	0.1565	
633.3	0.1546	
758.8	0.1518	
909.1	0.1481	
1089.0	0.1437	
1305.0	0.1384	
1564.0	0.1325	
1874.0	0.126	
2245.0	0.1191	
2690.0	0.1118	
3223.0	0.1043	
3861.0	0.09678	
4627.0	0.08925	
5543.0	0.08186	
6642.0	0.0747	
7958.0	0.06782	
9535.0	0.0613	
11420.0	0.05517	
13690.0	0.04946	
16400.0	0.04417	
19650.0	0.03931	
23540.0	0.03487	
28210.0	0.03084	
33800.0	0.0272	
40500.0	0.02393	
48520.0	0.021	
58140.0	0.01839	
69660.0	0.01607	
83460.0	0.01402	
-----