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Plasma-Surface Interaction Data Set 198

Sputtering of T+ on Al(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Al(pc) at 300 K

angle = 0.0 deg E /eV P
14.070.0
16.860.0004626
20.20.001591
24.210.003619
29.020.006822
34.770.01138
41.670.01724
49.940.02402
59.850.03113
71.730.03796
85.960.04404
103.00.04916
123.50.05331
147.90.05656
177.30.05903
212.50.06084
254.60.06206
305.20.06276
365.70.06299
438.30.06277
525.20.06213
629.50.06109
754.40.05967
904.00.05789
1083.00.0558
1298.00.05342
1556.00.05081
1865.00.04801
2235.00.04507
2678.00.04205
3210.00.039
3846.00.03596
4610.00.03298
5524.00.03008
6620.00.02731
7934.00.02468
9508.00.0222
11390.00.0199
13660.00.01777
16370.00.01581
19610.00.01402
23500.00.0124
28170.00.01093
33760.00.009615
40450.00.008437
48480.00.007387
58100.00.006454
69630.00.005628
83440.00.0049

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 14.07 – 100000