{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3384, "q": 0.1628, "mu": 1.378, "epsilonL": 0.0008809, "Eth": 14.07}, "E_min": 14.07, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.07	0.0	
16.86	0.0004626	
20.2	0.001591	
24.21	0.003619	
29.02	0.006822	
34.77	0.01138	
41.67	0.01724	
49.94	0.02402	
59.85	0.03113	
71.73	0.03796	
85.96	0.04404	
103.0	0.04916	
123.5	0.05331	
147.9	0.05656	
177.3	0.05903	
212.5	0.06084	
254.6	0.06206	
305.2	0.06276	
365.7	0.06299	
438.3	0.06277	
525.2	0.06213	
629.5	0.06109	
754.4	0.05967	
904.0	0.05789	
1083.0	0.0558	
1298.0	0.05342	
1556.0	0.05081	
1865.0	0.04801	
2235.0	0.04507	
2678.0	0.04205	
3210.0	0.039	
3846.0	0.03596	
4610.0	0.03298	
5524.0	0.03008	
6620.0	0.02731	
7934.0	0.02468	
9508.0	0.0222	
11390.0	0.0199	
13660.0	0.01777	
16370.0	0.01581	
19610.0	0.01402	
23500.0	0.0124	
28170.0	0.01093	
33760.0	0.009615	
40450.0	0.008437	
48480.0	0.007387	
58100.0	0.006454	
69630.0	0.005628	
83440.0	0.0049	
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