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Plasma-Surface Interaction Data Set 197

Sputtering of D+ on Al(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Al(pc) at 300 K

angle = 0.0 deg E /eV P
18.470.0
22.010.0004447
26.230.001516
31.270.003381
37.260.006198
44.410.009977
52.920.01451
63.070.01938
75.170.02413
89.580.0284
106.80.032
127.20.03491
151.60.03717
180.70.03887
215.40.0401
256.70.04092
305.90.04138
364.60.04152
434.50.04138
517.80.04096
617.10.04028
735.50.03937
876.50.03823
1045.00.03689
1245.00.03538
1484.00.03371
1768.00.03193
2107.00.03005
2511.00.02813
2993.00.02617
3567.00.02422
4251.00.0223
5066.00.02043
6038.00.01863
7196.00.01691
8576.00.01529
10220.00.01377
12180.00.01235
14520.00.01105
17300.00.009848
20620.00.008754
24570.00.00776
29280.00.006862
34900.00.006054
41590.00.005329
49570.00.004682
59080.00.004105
70410.00.003594
83910.00.00314

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 18.47 – 100000