{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2912, "q": 0.1076, "mu": 1.391, "epsilonL": 0.0009116, "Eth": 18.47}, "E_min": 18.47, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.47	0.0	
22.01	0.0004447	
26.23	0.001516	
31.27	0.003381	
37.26	0.006198	
44.41	0.009977	
52.92	0.01451	
63.07	0.01938	
75.17	0.02413	
89.58	0.0284	
106.8	0.032	
127.2	0.03491	
151.6	0.03717	
180.7	0.03887	
215.4	0.0401	
256.7	0.04092	
305.9	0.04138	
364.6	0.04152	
434.5	0.04138	
517.8	0.04096	
617.1	0.04028	
735.5	0.03937	
876.5	0.03823	
1045.0	0.03689	
1245.0	0.03538	
1484.0	0.03371	
1768.0	0.03193	
2107.0	0.03005	
2511.0	0.02813	
2993.0	0.02617	
3567.0	0.02422	
4251.0	0.0223	
5066.0	0.02043	
6038.0	0.01863	
7196.0	0.01691	
8576.0	0.01529	
10220.0	0.01377	
12180.0	0.01235	
14520.0	0.01105	
17300.0	0.009848	
20620.0	0.008754	
24570.0	0.00776	
29280.0	0.006862	
34900.0	0.006054	
41590.0	0.005329	
49570.0	0.004682	
59080.0	0.004105	
70410.0	0.003594	
83910.0	0.00314	
-----