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Plasma-Surface Interaction Data Set 196

Sputtering of H+ on Al(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Al(pc) at 300 K

angle = 0.0 deg E /eV P
30.229.288e-29
35.660.0001417
42.070.0005699
49.640.001403
58.570.002752
69.10.004637
81.530.006923
96.190.009344
113.50.01161
133.90.01354
158.00.01506
186.40.01618
219.90.01698
259.50.0175
306.20.01781
361.20.01795
426.20.01793
502.90.01779
593.30.01753
700.00.01718
825.90.01673
974.40.01619
1150.00.01559
1356.00.01492
1600.00.01421
1888.00.01345
2228.00.01267
2629.00.01187
3101.00.01106
3659.00.01027
4317.00.009481
5094.00.008719
6010.00.007985
7091.00.007285
8367.00.006622
9871.00.005999
11650.00.005417
13740.00.004876
16210.00.004378
19130.00.00392
22570.00.003501
26630.00.00312
31420.00.002775
37070.00.002463
43740.00.002182
51600.00.001929
60880.00.001703
71840.00.001502
84760.00.001322

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 30.22 – 100000