pwiDB

Plasma-Surface Interaction Data Set 195

Sputtering of Kr⁺ on Mg(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Mg(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.17	0.0
	15.81	6.358e-05
	18.97	0.0004148
	22.76	0.001462
	27.32	0.004004
	32.78	0.009507
	39.34	0.02048
	47.21	0.04075
	56.65	0.07527
	67.98	0.1287
	81.58	0.203
	97.9	0.2954
	117.5	0.3994
	141.0	0.5078
	169.2	0.6162
	203.0	0.7233
	243.6	0.8297
	292.4	0.9371
	350.8	1.047
	421.0	1.161
	505.2	1.281
	606.3	1.407
	727.6	1.539
	873.1	1.678
	1048.0	1.825
	1257.0	1.978
	1509.0	2.138
	1811.0	2.304
	2173.0	2.476
	2607.0	2.653
	3129.0	2.835
	3755.0	3.019
	4506.0	3.206
	5407.0	3.393
	6489.0	3.58
	7786.0	3.764
	9344.0	3.945
	11210.0	4.121
	13460.0	4.289
	16150.0	4.448
	19380.0	4.595
	23250.0	4.73
	27900.0	4.848
	33490.0	4.949
	40180.0	5.03
	48220.0	5.089
	57870.0	5.123
	69440.0	5.131
	83330.0	5.112

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2655
q = 13.12
mu = 2.15
epsilonL = 4.215e-06
Eth = 13.17

Fit range

E = 13.17 – 100000