{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mg", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Mg(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2655, "q": 13.12, "mu": 2.15, "epsilonL": 4.215e-06, "Eth": 13.17}, "E_min": 13.17, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.17	0.0	
15.81	6.358e-05	
18.97	0.0004148	
22.76	0.001462	
27.32	0.004004	
32.78	0.009507	
39.34	0.02048	
47.21	0.04075	
56.65	0.07527	
67.98	0.1287	
81.58	0.203	
97.9	0.2954	
117.5	0.3994	
141.0	0.5078	
169.2	0.6162	
203.0	0.7233	
243.6	0.8297	
292.4	0.9371	
350.8	1.047	
421.0	1.161	
505.2	1.281	
606.3	1.407	
727.6	1.539	
873.1	1.678	
1048.0	1.825	
1257.0	1.978	
1509.0	2.138	
1811.0	2.304	
2173.0	2.476	
2607.0	2.653	
3129.0	2.835	
3755.0	3.019	
4506.0	3.206	
5407.0	3.393	
6489.0	3.58	
7786.0	3.764	
9344.0	3.945	
11210.0	4.121	
13460.0	4.289	
16150.0	4.448	
19380.0	4.595	
23250.0	4.73	
27900.0	4.848	
33490.0	4.949	
40180.0	5.03	
48220.0	5.089	
57870.0	5.123	
69440.0	5.131	
83330.0	5.112	
-----