pwiDB

Plasma-Surface Interaction Data Set 193

Sputtering of Mg⁺ on Mg(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Mg⁺ on Mg(pc) at 300 K

angle = 0.0 deg	E /eV	P
	8.571	0.0
	10.38	0.0003279
	12.56	0.00152
	15.21	0.00432
	18.41	0.01002
	22.28	0.02064
	26.98	0.03912
	32.66	0.06911
	39.54	0.1142
	47.86	0.1766
	57.94	0.2553
	70.15	0.3464
	84.92	0.4439
	102.8	0.5426
	124.5	0.639
	150.7	0.732
	182.4	0.8216
	220.8	0.9085
	267.3	0.9937
	323.6	1.078
	391.7	1.161
	474.2	1.245
	574.1	1.327
	695.0	1.41
	841.4	1.491
	1019.0	1.57
	1233.0	1.647
	1493.0	1.721
	1807.0	1.791
	2188.0	1.857
	2649.0	1.917
	3206.0	1.97
	3882.0	2.015
	4699.0	2.051
	5689.0	2.078
	6887.0	2.094
	8337.0	2.098
	10090.0	2.09
	12220.0	2.069
	14790.0	2.035
	17910.0	1.988
	21680.0	1.928
	26240.0	1.857
	31770.0	1.776
	38460.0	1.685
	46560.0	1.588
	56360.0	1.486
	68230.0	1.381
	82600.0	1.275

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2574
q = 5.365
mu = 1.699
epsilonL = 3.489e-05
Eth = 8.571

Fit range

E = 8.571 – 100000