{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mg", "surface_phase": "pc", "species": {"text": "Mg+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Mg+ on Mg(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2574, "q": 5.365, "mu": 1.699, "epsilonL": 3.489e-05, "Eth": 8.571}, "E_min": 8.571, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
8.571	0.0	
10.38	0.0003279	
12.56	0.00152	
15.21	0.00432	
18.41	0.01002	
22.28	0.02064	
26.98	0.03912	
32.66	0.06911	
39.54	0.1142	
47.86	0.1766	
57.94	0.2553	
70.15	0.3464	
84.92	0.4439	
102.8	0.5426	
124.5	0.639	
150.7	0.732	
182.4	0.8216	
220.8	0.9085	
267.3	0.9937	
323.6	1.078	
391.7	1.161	
474.2	1.245	
574.1	1.327	
695.0	1.41	
841.4	1.491	
1019.0	1.57	
1233.0	1.647	
1493.0	1.721	
1807.0	1.791	
2188.0	1.857	
2649.0	1.917	
3206.0	1.97	
3882.0	2.015	
4699.0	2.051	
5689.0	2.078	
6887.0	2.094	
8337.0	2.098	
10090.0	2.09	
12220.0	2.069	
14790.0	2.035	
17910.0	1.988	
21680.0	1.928	
26240.0	1.857	
31770.0	1.776	
38460.0	1.685	
46560.0	1.588	
56360.0	1.486	
68230.0	1.381	
82600.0	1.275	
-----