pwiDB

Return to search

Plasma-Surface Interaction Data Set 192

Sputtering of Xe⁺ on C(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on C(pc) at 300 K

angle = 0.0 deg	E /eV	P
	145.4	0.0
	166.2	6.317e-05
	189.9	0.0002785
	216.9	0.000738
	247.9	0.001589
	283.2	0.00305
	323.6	0.005444
	369.8	0.009225
	422.6	0.01502
	482.8	0.02363
	551.7	0.03608
	630.4	0.0535
	720.3	0.07704
	823.0	0.1076
	940.4	0.1457
	1075.0	0.1909
	1228.0	0.2423
	1403.0	0.2982
	1603.0	0.3566
	1832.0	0.4157
	2093.0	0.4743
	2391.0	0.5314
	2732.0	0.5867
	3122.0	0.6402
	3568.0	0.692
	4076.0	0.7424
	4658.0	0.7918
	5322.0	0.8403
	6081.0	0.8883
	6949.0	0.9357
	7940.0	0.9829
	9072.0	1.03
	10370.0	1.076
	11840.0	1.122
	13530.0	1.168
	15460.0	1.213
	17670.0	1.257
	20190.0	1.301
	23070.0	1.343
	26360.0	1.384
	30120.0	1.424
	34420.0	1.461
	39320.0	1.497
	44930.0	1.53
	51340.0	1.561
	58660.0	1.589
	67030.0	1.614
	76590.0	1.635
	87520.0	1.653

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.4408
q = 4.3
mu = 1.773
epsilonL = 2.007e-06
Eth = 145.4

Fit range

E = 145.4 – 100000