{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4408, "q": 4.3, "mu": 1.773, "epsilonL": 2.007e-06, "Eth": 145.4}, "E_min": 145.4, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
145.4	0.0	
166.2	6.317e-05	
189.9	0.0002785	
216.9	0.000738	
247.9	0.001589	
283.2	0.00305	
323.6	0.005444	
369.8	0.009225	
422.6	0.01502	
482.8	0.02363	
551.7	0.03608	
630.4	0.0535	
720.3	0.07704	
823.0	0.1076	
940.4	0.1457	
1075.0	0.1909	
1228.0	0.2423	
1403.0	0.2982	
1603.0	0.3566	
1832.0	0.4157	
2093.0	0.4743	
2391.0	0.5314	
2732.0	0.5867	
3122.0	0.6402	
3568.0	0.692	
4076.0	0.7424	
4658.0	0.7918	
5322.0	0.8403	
6081.0	0.8883	
6949.0	0.9357	
7940.0	0.9829	
9072.0	1.03	
10370.0	1.076	
11840.0	1.122	
13530.0	1.168	
15460.0	1.213	
17670.0	1.257	
20190.0	1.301	
23070.0	1.343	
26360.0	1.384	
30120.0	1.424	
34420.0	1.461	
39320.0	1.497	
44930.0	1.53	
51340.0	1.561	
58660.0	1.589	
67030.0	1.614	
76590.0	1.635	
87520.0	1.653	
-----