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Plasma-Surface Interaction Data Set 191

Sputtering of Kr⁺ on C(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on C(pc) at 300 K

angle = 0.0 deg	E /eV	P
	88.29	0.0
	101.9	1.211e-05
	117.6	7.773e-05
	135.8	0.0002631
	156.8	0.0006864
	181.0	0.001553
	208.9	0.003209
	241.1	0.006222
	278.3	0.01148
	321.3	0.02031
	370.9	0.03454
	428.1	0.05639
	494.1	0.08807
	570.4	0.131
	658.4	0.1847
	760.1	0.2469
	877.3	0.3133
	1013.0	0.3797
	1169.0	0.4433
	1349.0	0.5024
	1558.0	0.5569
	1798.0	0.6073
	2076.0	0.6546
	2396.0	0.6996
	2766.0	0.7428
	3192.0	0.7849
	3685.0	0.826
	4254.0	0.8665
	4910.0	0.9065
	5668.0	0.9458
	6543.0	0.9844
	7553.0	1.022
	8718.0	1.059
	10060.0	1.095
	11620.0	1.129
	13410.0	1.162
	15480.0	1.193
	17870.0	1.222
	20620.0	1.248
	23810.0	1.272
	27480.0	1.293
	31720.0	1.311
	36620.0	1.325
	42270.0	1.336
	48790.0	1.342
	56320.0	1.344
	65020.0	1.342
	75050.0	1.335
	86630.0	1.324

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 1.363
q = 3.437
mu = 2.237
epsilonL = 5.01e-06
Eth = 88.29

Fit range

E = 88.29 – 100000