{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.363, "q": 3.437, "mu": 2.237, "epsilonL": 5.01e-06, "Eth": 88.29}, "E_min": 88.29, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
88.29	0.0	
101.9	1.211e-05	
117.6	7.773e-05	
135.8	0.0002631	
156.8	0.0006864	
181.0	0.001553	
208.9	0.003209	
241.1	0.006222	
278.3	0.01148	
321.3	0.02031	
370.9	0.03454	
428.1	0.05639	
494.1	0.08807	
570.4	0.131	
658.4	0.1847	
760.1	0.2469	
877.3	0.3133	
1013.0	0.3797	
1169.0	0.4433	
1349.0	0.5024	
1558.0	0.5569	
1798.0	0.6073	
2076.0	0.6546	
2396.0	0.6996	
2766.0	0.7428	
3192.0	0.7849	
3685.0	0.826	
4254.0	0.8665	
4910.0	0.9065	
5668.0	0.9458	
6543.0	0.9844	
7553.0	1.022	
8718.0	1.059	
10060.0	1.095	
11620.0	1.129	
13410.0	1.162	
15480.0	1.193	
17870.0	1.222	
20620.0	1.248	
23810.0	1.272	
27480.0	1.293	
31720.0	1.311	
36620.0	1.325	
42270.0	1.336	
48790.0	1.342	
56320.0	1.344	
65020.0	1.342	
75050.0	1.335	
86630.0	1.324	
-----