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Plasma-Surface Interaction Data Set 190

Sputtering of Ar⁺ on C(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on C(pc) at 300 K

angle = 0.0 deg	E /eV	P
	68.85	0.0
	79.88	0.0001618
	92.67	0.0005488
	107.5	0.001248
	124.7	0.002411
	144.7	0.004259
	167.9	0.007106
	194.8	0.01139
	226.0	0.0177
	262.2	0.02682
	304.2	0.03971
	353.0	0.05751
	409.5	0.08148
	475.1	0.1128
	551.2	0.1522
	639.6	0.1999
	742.0	0.2552
	860.9	0.3164
	998.8	0.3813
	1159.0	0.4471
	1344.0	0.5113
	1560.0	0.5722
	1810.0	0.6284
	2100.0	0.6795
	2436.0	0.7253
	2826.0	0.7661
	3279.0	0.8023
	3804.0	0.8342
	4414.0	0.8621
	5121.0	0.8863
	5941.0	0.9069
	6893.0	0.9242
	7997.0	0.938
	9278.0	0.9484
	10760.0	0.9553
	12490.0	0.9587
	14490.0	0.9585
	16810.0	0.9546
	19500.0	0.947
	22630.0	0.9356
	26250.0	0.9206
	30460.0	0.9019
	35340.0	0.8799
	41000.0	0.8547
	47570.0	0.8265
	55190.0	0.7957
	64030.0	0.7627
	74290.0	0.7279
	86190.0	0.6917

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 1.262
q = 2.458
mu = 1.395
epsilonL = 2.183e-05
Eth = 68.85

Fit range

E = 68.85 – 100000