{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.262, "q": 2.458, "mu": 1.395, "epsilonL": 2.183e-05, "Eth": 68.85}, "E_min": 68.85, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
68.85	0.0	
79.88	0.0001618	
92.67	0.0005488	
107.5	0.001248	
124.7	0.002411	
144.7	0.004259	
167.9	0.007106	
194.8	0.01139	
226.0	0.0177	
262.2	0.02682	
304.2	0.03971	
353.0	0.05751	
409.5	0.08148	
475.1	0.1128	
551.2	0.1522	
639.6	0.1999	
742.0	0.2552	
860.9	0.3164	
998.8	0.3813	
1159.0	0.4471	
1344.0	0.5113	
1560.0	0.5722	
1810.0	0.6284	
2100.0	0.6795	
2436.0	0.7253	
2826.0	0.7661	
3279.0	0.8023	
3804.0	0.8342	
4414.0	0.8621	
5121.0	0.8863	
5941.0	0.9069	
6893.0	0.9242	
7997.0	0.938	
9278.0	0.9484	
10760.0	0.9553	
12490.0	0.9587	
14490.0	0.9585	
16810.0	0.9546	
19500.0	0.947	
22630.0	0.9356	
26250.0	0.9206	
30460.0	0.9019	
35340.0	0.8799	
41000.0	0.8547	
47570.0	0.8265	
55190.0	0.7957	
64030.0	0.7627	
74290.0	0.7279	
86190.0	0.6917	
-----