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Plasma-Surface Interaction Data Set 188

Sputtering of O+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
34.138.129e-36
40.178.617e-06
47.284.841e-05
55.640.0001531
65.480.0003837
77.070.000847
90.710.001727
106.80.003329
125.60.006154
147.90.01098
174.00.01894
204.80.03158
241.10.05064
283.70.07752
333.90.1124
393.00.1536
462.60.1975
544.40.2397
640.70.2771
754.10.3083
887.50.3331
1045.00.3524
1229.00.3672
1447.00.3783
1703.00.3864
2004.00.3919
2359.00.3952
2776.00.3963
3267.00.3954
3845.00.3925
4526.00.3877
5327.00.381
6269.00.3725
7378.00.3623
8684.00.3505
10220.00.3373
12030.00.3229
14160.00.3075
16660.00.2912
19610.00.2745
23080.00.2574
27160.00.2402
31970.00.2231
37630.00.2064
44280.00.19
52120.00.1743
61340.00.1593
72190.00.1451
84970.00.1317

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 34.13 – 100000