{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of O+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 9.611, "q": 1.017, "mu": 2.01, "epsilonL": 0.0001076, "Eth": 34.13}, "E_min": 34.13, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.13	8.129e-36	
40.17	8.617e-06	
47.28	4.841e-05	
55.64	0.0001531	
65.48	0.0003837	
77.07	0.000847	
90.71	0.001727	
106.8	0.003329	
125.6	0.006154	
147.9	0.01098	
174.0	0.01894	
204.8	0.03158	
241.1	0.05064	
283.7	0.07752	
333.9	0.1124	
393.0	0.1536	
462.6	0.1975	
544.4	0.2397	
640.7	0.2771	
754.1	0.3083	
887.5	0.3331	
1045.0	0.3524	
1229.0	0.3672	
1447.0	0.3783	
1703.0	0.3864	
2004.0	0.3919	
2359.0	0.3952	
2776.0	0.3963	
3267.0	0.3954	
3845.0	0.3925	
4526.0	0.3877	
5327.0	0.381	
6269.0	0.3725	
7378.0	0.3623	
8684.0	0.3505	
10220.0	0.3373	
12030.0	0.3229	
14160.0	0.3075	
16660.0	0.2912	
19610.0	0.2745	
23080.0	0.2574	
27160.0	0.2402	
31970.0	0.2231	
37630.0	0.2064	
44280.0	0.19	
52120.0	0.1743	
61340.0	0.1593	
72190.0	0.1451	
84970.0	0.1317	
-----