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Plasma-Surface Interaction Data Set 187

Sputtering of N+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
34.940.0
41.12.178e-05
48.350.0001014
56.880.0002844
66.910.0006494
78.710.001325
92.590.002518
108.90.004547
128.10.007893
150.70.01324
177.30.02147
208.60.03364
245.40.05067
288.70.07299
339.60.1001
399.50.1302
469.90.1609
552.80.1898
650.30.2151
765.00.236
899.90.2528
1059.00.2656
1245.00.2753
1465.00.2821
1723.00.2867
2027.00.2893
2385.00.29
2805.00.2891
3300.00.2866
3882.00.2826
4567.00.2772
5373.00.2704
6320.00.2625
7435.00.2533
8746.00.2433
10290.00.2323
12100.00.2207
14240.00.2086
16750.00.1962
19700.00.1836
23180.00.1711
27270.00.1586
32080.00.1465
37730.00.1347
44390.00.1234
52220.00.1126
61430.00.1024
72260.00.09284
85010.00.08391

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 34.94 – 100000