{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of N+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 5.429, "q": 0.7481, "mu": 1.77, "epsilonL": 0.0001355, "Eth": 34.94}, "E_min": 34.94, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.94	0.0	
41.1	2.178e-05	
48.35	0.0001014	
56.88	0.0002844	
66.91	0.0006494	
78.71	0.001325	
92.59	0.002518	
108.9	0.004547	
128.1	0.007893	
150.7	0.01324	
177.3	0.02147	
208.6	0.03364	
245.4	0.05067	
288.7	0.07299	
339.6	0.1001	
399.5	0.1302	
469.9	0.1609	
552.8	0.1898	
650.3	0.2151	
765.0	0.236	
899.9	0.2528	
1059.0	0.2656	
1245.0	0.2753	
1465.0	0.2821	
1723.0	0.2867	
2027.0	0.2893	
2385.0	0.29	
2805.0	0.2891	
3300.0	0.2866	
3882.0	0.2826	
4567.0	0.2772	
5373.0	0.2704	
6320.0	0.2625	
7435.0	0.2533	
8746.0	0.2433	
10290.0	0.2323	
12100.0	0.2207	
14240.0	0.2086	
16750.0	0.1962	
19700.0	0.1836	
23180.0	0.1711	
27270.0	0.1586	
32080.0	0.1465	
37730.0	0.1347	
44390.0	0.1234	
52220.0	0.1126	
61430.0	0.1024	
72260.0	0.09284	
85010.0	0.08391	
-----