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Plasma-Surface Interaction Data Set 186

Sputtering of C⁺ on C(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of C⁺ on C(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.45	0.0
	25.48	4.167e-06
	30.27	2.551e-05
	35.97	8.59e-05
	42.74	0.000227
	50.78	0.0005261
	60.33	0.001123
	71.69	0.002262
	85.17	0.00436
	101.2	0.008097
	120.2	0.0145
	142.9	0.02498
	169.7	0.04107
	201.7	0.0638
	239.6	0.09275
	284.7	0.1255
	338.3	0.1582
	401.9	0.1875
	477.5	0.2117
	567.4	0.2306
	674.1	0.2449
	801.0	0.2555
	951.7	0.2631
	1131.0	0.2683
	1343.0	0.2716
	1596.0	0.2731
	1897.0	0.273
	2253.0	0.2713
	2677.0	0.2682
	3181.0	0.2635
	3780.0	0.2575
	4491.0	0.2501
	5336.0	0.2415
	6340.0	0.2318
	7533.0	0.2212
	8950.0	0.2098
	10630.0	0.1979
	12630.0	0.1856
	15010.0	0.173
	17840.0	0.1605
	21190.0	0.1482
	25180.0	0.1361
	29920.0	0.1244
	35540.0	0.1133
	42230.0	0.1027
	50180.0	0.09274
	59620.0	0.08347
	70840.0	0.07487
	84160.0	0.06695

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 13.97
q = 0.7015
mu = 2.095
epsilonL = 0.0001758
Eth = 21.45

Fit range

E = 21.45 – 100000