{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "C+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of C+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 13.97, "q": 0.7015, "mu": 2.095, "epsilonL": 0.0001758, "Eth": 21.45}, "E_min": 21.45, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.45	0.0	
25.48	4.167e-06	
30.27	2.551e-05	
35.97	8.59e-05	
42.74	0.000227	
50.78	0.0005261	
60.33	0.001123	
71.69	0.002262	
85.17	0.00436	
101.2	0.008097	
120.2	0.0145	
142.9	0.02498	
169.7	0.04107	
201.7	0.0638	
239.6	0.09275	
284.7	0.1255	
338.3	0.1582	
401.9	0.1875	
477.5	0.2117	
567.4	0.2306	
674.1	0.2449	
801.0	0.2555	
951.7	0.2631	
1131.0	0.2683	
1343.0	0.2716	
1596.0	0.2731	
1897.0	0.273	
2253.0	0.2713	
2677.0	0.2682	
3181.0	0.2635	
3780.0	0.2575	
4491.0	0.2501	
5336.0	0.2415	
6340.0	0.2318	
7533.0	0.2212	
8950.0	0.2098	
10630.0	0.1979	
12630.0	0.1856	
15010.0	0.173	
17840.0	0.1605	
21190.0	0.1482	
25180.0	0.1361	
29920.0	0.1244	
35540.0	0.1133	
42230.0	0.1027	
50180.0	0.09274	
59620.0	0.08347	
70840.0	0.07487	
84160.0	0.06695	
-----