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Plasma-Surface Interaction Data Set 185

Sputtering of 4He+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
19.120.0
22.782.808e-05
27.120.000135
32.30.0003892
38.470.0009085
45.820.001884
54.560.003603
64.980.006457
77.390.01089
92.160.01725
109.80.02552
130.70.0351
155.70.04493
185.40.05385
220.80.06109
262.90.06643
313.20.06999
372.90.07206
444.10.07294
529.00.07288
629.90.07206
750.20.07064
893.50.0687
1064.00.06633
1267.00.06361
1509.00.06061
1797.00.05738
2140.00.05399
2549.00.05051
3036.00.04698
3615.00.04346
4306.00.04
5128.00.03664
6107.00.0334
7273.00.03032
8662.00.02741
10320.00.02468
12280.00.02215
14630.00.01981
17420.00.01767
20750.00.01571
24710.00.01393
29430.00.01232
35050.00.01087
41740.00.009575
49710.00.008415
59200.00.007382
70510.00.006464
83970.00.005651

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 19.12 – 100000