{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 4.591, "q": 0.1951, "mu": 1.785, "epsilonL": 0.0009198, "Eth": 19.12}, "E_min": 19.12, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
19.12	0.0	
22.78	2.808e-05	
27.12	0.000135	
32.3	0.0003892	
38.47	0.0009085	
45.82	0.001884	
54.56	0.003603	
64.98	0.006457	
77.39	0.01089	
92.16	0.01725	
109.8	0.02552	
130.7	0.0351	
155.7	0.04493	
185.4	0.05385	
220.8	0.06109	
262.9	0.06643	
313.2	0.06999	
372.9	0.07206	
444.1	0.07294	
529.0	0.07288	
629.9	0.07206	
750.2	0.07064	
893.5	0.0687	
1064.0	0.06633	
1267.0	0.06361	
1509.0	0.06061	
1797.0	0.05738	
2140.0	0.05399	
2549.0	0.05051	
3036.0	0.04698	
3615.0	0.04346	
4306.0	0.04	
5128.0	0.03664	
6107.0	0.0334	
7273.0	0.03032	
8662.0	0.02741	
10320.0	0.02468	
12280.0	0.02215	
14630.0	0.01981	
17420.0	0.01767	
20750.0	0.01571	
24710.0	0.01393	
29430.0	0.01232	
35050.0	0.01087	
41740.0	0.009575	
49710.0	0.008415	
59200.0	0.007382	
70510.0	0.006464	
83970.0	0.005651	
-----