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Plasma-Surface Interaction Data Set 184

Sputtering of 3He+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
29.889.541e-22
35.270.0007416
41.620.002164
49.120.00443
57.960.007764
68.40.01236
80.720.01828
95.270.02542
112.40.0334
132.70.04169
156.60.04969
184.80.05688
218.10.06293
257.30.0677
303.70.07119
358.40.07351
423.00.07478
499.20.07515
589.10.07475
695.20.07368
820.40.07205
968.20.06995
1143.00.06744
1348.00.06461
1591.00.06152
1878.00.05824
2216.00.05483
2615.00.05134
3087.00.04783
3642.00.04434
4299.00.04092
5073.00.0376
5987.00.0344
7065.00.03136
8338.00.02848
9840.00.02578
11610.00.02326
13700.00.02093
16170.00.01878
19090.00.0168
22520.00.015
26580.00.01336
31370.00.01187
37020.00.01053
43690.00.009322
51560.00.008239
60840.00.007271
71800.00.006406
84740.00.005637

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 29.88 – 100000