{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.7341, "q": 0.2058, "mu": 1.196, "epsilonL": 0.0009798, "Eth": 29.88}, "E_min": 29.88, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.88	9.541e-22	
35.27	0.0007416	
41.62	0.002164	
49.12	0.00443	
57.96	0.007764	
68.4	0.01236	
80.72	0.01828	
95.27	0.02542	
112.4	0.0334	
132.7	0.04169	
156.6	0.04969	
184.8	0.05688	
218.1	0.06293	
257.3	0.0677	
303.7	0.07119	
358.4	0.07351	
423.0	0.07478	
499.2	0.07515	
589.1	0.07475	
695.2	0.07368	
820.4	0.07205	
968.2	0.06995	
1143.0	0.06744	
1348.0	0.06461	
1591.0	0.06152	
1878.0	0.05824	
2216.0	0.05483	
2615.0	0.05134	
3087.0	0.04783	
3642.0	0.04434	
4299.0	0.04092	
5073.0	0.0376	
5987.0	0.0344	
7065.0	0.03136	
8338.0	0.02848	
9840.0	0.02578	
11610.0	0.02326	
13700.0	0.02093	
16170.0	0.01878	
19090.0	0.0168	
22520.0	0.015	
26580.0	0.01336	
31370.0	0.01187	
37020.0	0.01053	
43690.0	0.009322	
51560.0	0.008239	
60840.0	0.007271	
71800.0	0.006406	
84740.0	0.005637	
-----