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Plasma-Surface Interaction Data Set 183

Sputtering of T+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
23.620.0
28.010.000187
33.210.0005345
39.380.00109
46.70.001923
55.370.003109
65.660.004708
77.860.006745
92.330.009177
109.50.01188
129.80.01464
154.00.01725
182.60.01951
216.50.02129
256.70.02253
304.40.02325
361.00.02352
428.00.02339
507.60.02294
601.90.02225
713.70.02136
846.40.02033
1004.00.01921
1190.00.01802
1411.00.0168
1673.00.01557
1984.00.01436
2353.00.01317
2790.00.01203
3309.00.01094
3924.00.009913
4653.00.008947
5517.00.008048
6543.00.007217
7758.00.006452
9200.00.005753
10910.00.005116
12940.00.004539
15340.00.004018
18190.00.00355
21570.00.003131
25580.00.002756
30330.00.002421
35970.00.002124
42650.00.001861
50580.00.001628
59970.00.001423
71120.00.001242
84330.00.001083

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 23.62 – 100000