{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.905, "q": 0.0718, "mu": 1.151, "epsilonL": 0.002089, "Eth": 23.62}, "E_min": 23.62, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.62	0.0	
28.01	0.000187	
33.21	0.0005345	
39.38	0.00109	
46.7	0.001923	
55.37	0.003109	
65.66	0.004708	
77.86	0.006745	
92.33	0.009177	
109.5	0.01188	
129.8	0.01464	
154.0	0.01725	
182.6	0.01951	
216.5	0.02129	
256.7	0.02253	
304.4	0.02325	
361.0	0.02352	
428.0	0.02339	
507.6	0.02294	
601.9	0.02225	
713.7	0.02136	
846.4	0.02033	
1004.0	0.01921	
1190.0	0.01802	
1411.0	0.0168	
1673.0	0.01557	
1984.0	0.01436	
2353.0	0.01317	
2790.0	0.01203	
3309.0	0.01094	
3924.0	0.009913	
4653.0	0.008947	
5517.0	0.008048	
6543.0	0.007217	
7758.0	0.006452	
9200.0	0.005753	
10910.0	0.005116	
12940.0	0.004539	
15340.0	0.004018	
18190.0	0.00355	
21570.0	0.003131	
25580.0	0.002756	
30330.0	0.002421	
35970.0	0.002124	
42650.0	0.001861	
50580.0	0.001628	
59970.0	0.001423	
71120.0	0.001242	
84330.0	0.001083	
-----