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Plasma-Surface Interaction Data Set 181

Sputtering of H+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
45.359.429e-05
53.240.0003193
62.50.000708
73.370.001297
86.140.002101
101.10.003089
118.70.004178
139.40.005251
163.60.006199
192.10.006948
225.50.007474
264.70.007789
310.80.007922
364.80.00791
428.30.007784
502.80.007573
590.30.007297
693.00.006976
813.50.006622
955.00.006248
1121.00.005861
1316.00.00547
1545.00.00508
1814.00.004697
2130.00.004325
2500.00.003967
2935.00.003625
3446.00.003302
4045.00.002997
4749.00.002713
5575.00.002449
6544.00.002204
7683.00.00198
9019.00.001774
10590.00.001586
12430.00.001415
14590.00.00126
17130.00.001121
20110.00.0009947
23610.00.0008816
27720.00.0007802
32540.00.0006896
38200.00.0006087
44850.00.0005366
52650.00.0004726
61810.00.0004157
72560.00.0003654
85180.00.0003208

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 38.63 – 100000