{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of H+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.353, "q": 0.0241, "mu": 1.41, "epsilonL": 0.002412, "Eth": 38.63}, "E_min": 38.63, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
45.35	9.429e-05	
53.24	0.0003193	
62.5	0.000708	
73.37	0.001297	
86.14	0.002101	
101.1	0.003089	
118.7	0.004178	
139.4	0.005251	
163.6	0.006199	
192.1	0.006948	
225.5	0.007474	
264.7	0.007789	
310.8	0.007922	
364.8	0.00791	
428.3	0.007784	
502.8	0.007573	
590.3	0.007297	
693.0	0.006976	
813.5	0.006622	
955.0	0.006248	
1121.0	0.005861	
1316.0	0.00547	
1545.0	0.00508	
1814.0	0.004697	
2130.0	0.004325	
2500.0	0.003967	
2935.0	0.003625	
3446.0	0.003302	
4045.0	0.002997	
4749.0	0.002713	
5575.0	0.002449	
6544.0	0.002204	
7683.0	0.00198	
9019.0	0.001774	
10590.0	0.001586	
12430.0	0.001415	
14590.0	0.00126	
17130.0	0.001121	
20110.0	0.0009947	
23610.0	0.0008816	
27720.0	0.0007802	
32540.0	0.0006896	
38200.0	0.0006087	
44850.0	0.0005366	
52650.0	0.0004726	
61810.0	0.0004157	
72560.0	0.0003654	
85180.0	0.0003208	
-----