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Plasma-Surface Interaction Data Set 180

Sputtering of Ne⁺ on B(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on B(pc) at 300 K

angle = 0.0 deg	E /eV	P
	47.07	1.153e-20
	55.04	0.0005838
	64.35	0.001614
	75.24	0.003234
	87.98	0.005677
	102.9	0.009257
	120.3	0.01438
	140.6	0.02156
	164.4	0.0314
	192.3	0.04455
	224.8	0.0617
	262.8	0.08337
	307.3	0.1098
	359.3	0.141
	420.1	0.1761
	491.3	0.2141
	574.4	0.2536
	671.6	0.2927
	785.3	0.3302
	918.2	0.3649
	1074.0	0.396
	1255.0	0.4232
	1468.0	0.4464
	1716.0	0.4657
	2006.0	0.4812
	2346.0	0.4933
	2743.0	0.5021
	3207.0	0.5078
	3750.0	0.5106
	4385.0	0.5105
	5127.0	0.5078
	5994.0	0.5024
	7009.0	0.4946
	8195.0	0.4844
	9582.0	0.472
	11200.0	0.4577
	13100.0	0.4415
	15320.0	0.4238
	17910.0	0.4047
	20940.0	0.3847
	24480.0	0.3639
	28630.0	0.3426
	33470.0	0.3211
	39140.0	0.2997
	45760.0	0.2785
	53500.0	0.2578
	62560.0	0.2377
	73150.0	0.2184
	85530.0	0.2

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.8654
q = 1.327
mu = 1.118
epsilonL = 8.252e-05
Eth = 47.07

Fit range

E = 47.07 – 100000