{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8654, "q": 1.327, "mu": 1.118, "epsilonL": 8.252e-05, "Eth": 47.07}, "E_min": 47.07, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
47.07	1.153e-20	
55.04	0.0005838	
64.35	0.001614	
75.24	0.003234	
87.98	0.005677	
102.9	0.009257	
120.3	0.01438	
140.6	0.02156	
164.4	0.0314	
192.3	0.04455	
224.8	0.0617	
262.8	0.08337	
307.3	0.1098	
359.3	0.141	
420.1	0.1761	
491.3	0.2141	
574.4	0.2536	
671.6	0.2927	
785.3	0.3302	
918.2	0.3649	
1074.0	0.396	
1255.0	0.4232	
1468.0	0.4464	
1716.0	0.4657	
2006.0	0.4812	
2346.0	0.4933	
2743.0	0.5021	
3207.0	0.5078	
3750.0	0.5106	
4385.0	0.5105	
5127.0	0.5078	
5994.0	0.5024	
7009.0	0.4946	
8195.0	0.4844	
9582.0	0.472	
11200.0	0.4577	
13100.0	0.4415	
15320.0	0.4238	
17910.0	0.4047	
20940.0	0.3847	
24480.0	0.3639	
28630.0	0.3426	
33470.0	0.3211	
39140.0	0.2997	
45760.0	0.2785	
53500.0	0.2578	
62560.0	0.2377	
73150.0	0.2184	
85530.0	0.2	
-----