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Plasma-Surface Interaction Data Set 179

Sputtering of O+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
44.780.0
52.420.000588
61.350.00172
71.80.003569
84.040.006425
98.360.01068
115.10.01681
134.70.02542
157.70.03712
184.60.05253
216.10.07206
252.90.0958
296.00.1234
346.40.1539
405.50.186
474.60.2182
555.40.249
650.10.2774
760.90.3027
890.60.3245
1042.00.3428
1220.00.3577
1428.00.3695
1671.00.3783
1956.00.3845
2289.00.3881
2680.00.3894
3136.00.3885
3671.00.3855
4296.00.3805
5029.00.3736
5886.00.3649
6889.00.3546
8063.00.3428
9437.00.3297
11050.00.3156
12930.00.3005
15130.00.2847
17710.00.2685
20730.00.2521
24260.00.2356
28400.00.2192
33230.00.2031
38900.00.1875
45530.00.1724
53290.00.158
62370.00.1443
73000.00.1314
85440.00.1193

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 44.78 – 100000