{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of O+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8342, "q": 1.013, "mu": 1.191, "epsilonL": 0.0001246, "Eth": 44.78}, "E_min": 44.78, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
44.78	0.0	
52.42	0.000588	
61.35	0.00172	
71.8	0.003569	
84.04	0.006425	
98.36	0.01068	
115.1	0.01681	
134.7	0.02542	
157.7	0.03712	
184.6	0.05253	
216.1	0.07206	
252.9	0.0958	
296.0	0.1234	
346.4	0.1539	
405.5	0.186	
474.6	0.2182	
555.4	0.249	
650.1	0.2774	
760.9	0.3027	
890.6	0.3245	
1042.0	0.3428	
1220.0	0.3577	
1428.0	0.3695	
1671.0	0.3783	
1956.0	0.3845	
2289.0	0.3881	
2680.0	0.3894	
3136.0	0.3885	
3671.0	0.3855	
4296.0	0.3805	
5029.0	0.3736	
5886.0	0.3649	
6889.0	0.3546	
8063.0	0.3428	
9437.0	0.3297	
11050.0	0.3156	
12930.0	0.3005	
15130.0	0.2847	
17710.0	0.2685	
20730.0	0.2521	
24260.0	0.2356	
28400.0	0.2192	
33230.0	0.2031	
38900.0	0.1875	
45530.0	0.1724	
53290.0	0.158	
62370.0	0.1443	
73000.0	0.1314	
85440.0	0.1193	
-----