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Plasma-Surface Interaction Data Set 178

Sputtering of B+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of B+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
26.791.462e-28
31.680.0001026
37.470.00042
44.320.001089
52.420.002343
62.00.004546
73.330.008244
86.740.01422
102.60.02352
121.30.03738
143.50.05703
169.70.08325
200.80.1158
237.50.1531
280.90.1922
332.20.23
392.90.2638
464.70.2922
549.70.3148
650.10.332
769.00.3444
909.50.3527
1076.00.3574
1272.00.3592
1505.00.3583
1780.00.355
2105.00.3496
2490.00.3421
2945.00.3328
3483.00.3218
4120.00.3094
4873.00.2957
5764.00.2811
6817.00.2656
8063.00.2497
9537.00.2335
11280.00.2172
13340.00.2011
15780.00.1853
18660.00.17
22080.00.1553
26110.00.1414
30880.00.1282
36530.00.1158
43200.00.1043
51100.00.09368
60440.00.08389
71480.00.07492
84550.00.06675

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 26.79 – 100000