{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "B+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of B+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 3.163, "q": 0.9355, "mu": 1.594, "epsilonL": 0.0002691, "Eth": 26.79}, "E_min": 26.79, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
26.79	1.462e-28	
31.68	0.0001026	
37.47	0.00042	
44.32	0.001089	
52.42	0.002343	
62.0	0.004546	
73.33	0.008244	
86.74	0.01422	
102.6	0.02352	
121.3	0.03738	
143.5	0.05703	
169.7	0.08325	
200.8	0.1158	
237.5	0.1531	
280.9	0.1922	
332.2	0.23	
392.9	0.2638	
464.7	0.2922	
549.7	0.3148	
650.1	0.332	
769.0	0.3444	
909.5	0.3527	
1076.0	0.3574	
1272.0	0.3592	
1505.0	0.3583	
1780.0	0.355	
2105.0	0.3496	
2490.0	0.3421	
2945.0	0.3328	
3483.0	0.3218	
4120.0	0.3094	
4873.0	0.2957	
5764.0	0.2811	
6817.0	0.2656	
8063.0	0.2497	
9537.0	0.2335	
11280.0	0.2172	
13340.0	0.2011	
15780.0	0.1853	
18660.0	0.17	
22080.0	0.1553	
26110.0	0.1414	
30880.0	0.1282	
36530.0	0.1158	
43200.0	0.1043	
51100.0	0.09368	
60440.0	0.08389	
71480.0	0.07492	
84550.0	0.06675	
-----