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Plasma-Surface Interaction Data Set 177

Sputtering of 4He+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
23.530.0
27.910.0009597
33.10.002394
39.250.004481
46.540.00741
55.20.01137
65.460.01653
77.630.02295
92.060.03055
109.20.03908
129.50.04812
153.50.05713
182.10.06557
215.90.07299
256.10.0791
303.70.08377
360.10.087
427.10.08886
506.40.08948
600.60.08903
712.20.08765
844.60.08548
1002.00.08266
1188.00.07931
1409.00.07555
1671.00.07149
1981.00.06722
2349.00.06283
2786.00.0584
3304.00.054
3918.00.04968
4647.00.0455
5511.00.04149
6535.00.03767
7750.00.03408
9190.00.03072
10900.00.02761
12930.00.02473
15330.00.02209
18180.00.01967
21560.00.01748
25560.00.0155
30320.00.01371
35950.00.0121
42630.00.01067
50560.00.009383
59960.00.00824
71110.00.007226
84320.00.006327

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 23.53 – 100000