{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.9493, "q": 0.2551, "mu": 0.9796, "epsilonL": 0.001118, "Eth": 23.53}, "E_min": 23.53, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.53	0.0	
27.91	0.0009597	
33.1	0.002394	
39.25	0.004481	
46.54	0.00741	
55.2	0.01137	
65.46	0.01653	
77.63	0.02295	
92.06	0.03055	
109.2	0.03908	
129.5	0.04812	
153.5	0.05713	
182.1	0.06557	
215.9	0.07299	
256.1	0.0791	
303.7	0.08377	
360.1	0.087	
427.1	0.08886	
506.4	0.08948	
600.6	0.08903	
712.2	0.08765	
844.6	0.08548	
1002.0	0.08266	
1188.0	0.07931	
1409.0	0.07555	
1671.0	0.07149	
1981.0	0.06722	
2349.0	0.06283	
2786.0	0.0584	
3304.0	0.054	
3918.0	0.04968	
4647.0	0.0455	
5511.0	0.04149	
6535.0	0.03767	
7750.0	0.03408	
9190.0	0.03072	
10900.0	0.02761	
12930.0	0.02473	
15330.0	0.02209	
18180.0	0.01967	
21560.0	0.01748	
25560.0	0.0155	
30320.0	0.01371	
35950.0	0.0121	
42630.0	0.01067	
50560.0	0.009383	
59960.0	0.00824	
71110.0	0.007226	
84320.0	0.006327	
-----