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Plasma-Surface Interaction Data Set 175

Sputtering of T+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
18.230.0
21.730.000201
25.90.0006689
30.880.001507
36.810.002869
43.880.004928
52.310.007826
62.360.0116
74.340.01611
88.620.02099
105.60.02577
125.90.02997
150.10.03331
179.00.03566
213.40.03705
254.30.03762
303.20.03751
361.40.03685
430.90.03578
513.60.03439
612.30.03277
729.90.03098
870.10.02908
1037.00.02712
1237.00.02514
1474.00.02317
1757.00.02125
2095.00.01939
2497.00.01761
2977.00.01593
3549.00.01435
4231.00.01288
5043.00.01152
6012.00.01028
7167.00.009136
8544.00.0081
10180.00.007163
12140.00.00632
14470.00.005564
17250.00.004888
20570.00.004286
24520.00.003752
29230.00.003279
34840.00.002861
41540.00.002492
49520.00.002168
59030.00.001884
70370.00.001635
83890.00.001418

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 18.23 – 100000