{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 2.018, "q": 0.1107, "mu": 1.332, "epsilonL": 0.002568, "Eth": 18.23}, "E_min": 18.23, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.23	0.0	
21.73	0.000201	
25.9	0.0006689	
30.88	0.001507	
36.81	0.002869	
43.88	0.004928	
52.31	0.007826	
62.36	0.0116	
74.34	0.01611	
88.62	0.02099	
105.6	0.02577	
125.9	0.02997	
150.1	0.03331	
179.0	0.03566	
213.4	0.03705	
254.3	0.03762	
303.2	0.03751	
361.4	0.03685	
430.9	0.03578	
513.6	0.03439	
612.3	0.03277	
729.9	0.03098	
870.1	0.02908	
1037.0	0.02712	
1237.0	0.02514	
1474.0	0.02317	
1757.0	0.02125	
2095.0	0.01939	
2497.0	0.01761	
2977.0	0.01593	
3549.0	0.01435	
4231.0	0.01288	
5043.0	0.01152	
6012.0	0.01028	
7167.0	0.009136	
8544.0	0.0081	
10180.0	0.007163	
12140.0	0.00632	
14470.0	0.005564	
17250.0	0.004888	
20570.0	0.004286	
24520.0	0.003752	
29230.0	0.003279	
34840.0	0.002861	
41540.0	0.002492	
49520.0	0.002168	
59030.0	0.001884	
70370.0	0.001635	
83890.0	0.001418	
-----