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Plasma-Surface Interaction Data Set 173

Sputtering of H+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
28.580.0
33.750.0002038
39.870.0006666
47.090.001433
55.630.002534
65.710.003933
77.620.00551
91.680.007088
108.30.008494
127.90.009616
151.10.01042
178.50.01091
210.80.01115
249.00.01117
294.10.01103
347.40.01076
410.40.0104
484.80.009964
572.60.009477
676.40.008955
799.00.008409
943.70.007853
1115.00.007294
1317.00.006742
1555.00.006204
1837.00.005683
2170.00.005186
2563.00.004714
3028.00.00427
3577.00.003855
4225.00.003469
4990.00.003113
5894.00.002786
6963.00.002488
8224.00.002216
9715.00.001969
11470.00.001747
13550.00.001546
16010.00.001366
18910.00.001205
22340.00.001062
26390.00.000934
31170.00.0008204
36820.00.0007197
43490.00.0006306
51370.00.0005519
60680.00.0004825
71670.00.0004215
84660.00.0003678

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 28.58 – 100000