{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8989, "q": 0.0329, "mu": 1.369, "epsilonL": 0.003004, "Eth": 28.58}, "E_min": 28.58, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.58	0.0	
33.75	0.0002038	
39.87	0.0006666	
47.09	0.001433	
55.63	0.002534	
65.71	0.003933	
77.62	0.00551	
91.68	0.007088	
108.3	0.008494	
127.9	0.009616	
151.1	0.01042	
178.5	0.01091	
210.8	0.01115	
249.0	0.01117	
294.1	0.01103	
347.4	0.01076	
410.4	0.0104	
484.8	0.009964	
572.6	0.009477	
676.4	0.008955	
799.0	0.008409	
943.7	0.007853	
1115.0	0.007294	
1317.0	0.006742	
1555.0	0.006204	
1837.0	0.005683	
2170.0	0.005186	
2563.0	0.004714	
3028.0	0.00427	
3577.0	0.003855	
4225.0	0.003469	
4990.0	0.003113	
5894.0	0.002786	
6963.0	0.002488	
8224.0	0.002216	
9715.0	0.001969	
11470.0	0.001747	
13550.0	0.001546	
16010.0	0.001366	
18910.0	0.001205	
22340.0	0.001062	
26390.0	0.000934	
31170.0	0.0008204	
36820.0	0.0007197	
43490.0	0.0006306	
51370.0	0.0005519	
60680.0	0.0004825	
71670.0	0.0004215	
84660.0	0.0003678	
-----