pwiDB

Plasma-Surface Interaction Data Set 172

Sputtering of Xe⁺ on Be(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Be(pc) at 300 K

angle = 0.0 deg	E /eV	P
	86.94	4.067e-32
	100.4	8.1e-05
	115.9	0.0003821
	133.9	0.001065
	154.6	0.002396
	178.5	0.00479
	206.1	0.008878
	237.9	0.01559
	274.8	0.02625
	317.3	0.04262
	366.3	0.06693
	423.0	0.1017
	488.4	0.1492
	564.0	0.2112
	651.2	0.2879
	752.0	0.3777
	868.3	0.4774
	1003.0	0.5831
	1158.0	0.6908
	1337.0	0.7979
	1544.0	0.9026
	1782.0	1.004
	2058.0	1.103
	2376.0	1.199
	2744.0	1.294
	3168.0	1.388
	3659.0	1.481
	4225.0	1.574
	4878.0	1.667
	5633.0	1.76
	6504.0	1.853
	7510.0	1.947
	8672.0	2.04
	10010.0	2.133
	11560.0	2.226
	13350.0	2.318
	15420.0	2.408
	17800.0	2.496
	20550.0	2.581
	23730.0	2.664
	27400.0	2.743
	31640.0	2.818
	36540.0	2.888
	42190.0	2.953
	48720.0	3.011
	56250.0	3.063
	64950.0	3.107
	75000.0	3.143
	86600.0	3.171

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.4779
q = 8.174
mu = 1.835
epsilonL = 2.359e-06
Eth = 86.94

Fit range

E = 86.94 – 100000