{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4779, "q": 8.174, "mu": 1.835, "epsilonL": 2.359e-06, "Eth": 86.94}, "E_min": 86.94, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
86.94	4.067e-32	
100.4	8.1e-05	
115.9	0.0003821	
133.9	0.001065	
154.6	0.002396	
178.5	0.00479	
206.1	0.008878	
237.9	0.01559	
274.8	0.02625	
317.3	0.04262	
366.3	0.06693	
423.0	0.1017	
488.4	0.1492	
564.0	0.2112	
651.2	0.2879	
752.0	0.3777	
868.3	0.4774	
1003.0	0.5831	
1158.0	0.6908	
1337.0	0.7979	
1544.0	0.9026	
1782.0	1.004	
2058.0	1.103	
2376.0	1.199	
2744.0	1.294	
3168.0	1.388	
3659.0	1.481	
4225.0	1.574	
4878.0	1.667	
5633.0	1.76	
6504.0	1.853	
7510.0	1.947	
8672.0	2.04	
10010.0	2.133	
11560.0	2.226	
13350.0	2.318	
15420.0	2.408	
17800.0	2.496	
20550.0	2.581	
23730.0	2.664	
27400.0	2.743	
31640.0	2.818	
36540.0	2.888	
42190.0	2.953	
48720.0	3.011	
56250.0	3.063	
64950.0	3.107	
75000.0	3.143	
86600.0	3.171	
-----