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Plasma-Surface Interaction Data Set 171

Sputtering of Kr+ on Be(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Be(pc) at 300 K

angle = 0.0 deg E /eV P
61.450.0
71.460.0001045
83.10.0005501
96.640.00165
112.40.003931
130.70.008237
152.00.01586
176.70.02864
205.50.04902
239.00.07978
277.90.1234
323.20.1812
375.90.2523
437.10.3335
508.30.4203
591.10.5081
687.30.5936
799.30.6752
929.50.7526
1081.00.8263
1257.00.8971
1462.00.9657
1700.01.033
1977.01.099
2299.01.165
2673.01.23
3109.01.296
3615.01.36
4204.01.425
4889.01.488
5685.01.551
6611.01.612
7688.01.672
8940.01.73
10400.01.785
12090.01.837
14060.01.886
16350.01.931
19010.01.972
22110.02.008
25710.02.038
29900.02.062
34770.02.081
40440.02.092
47020.02.096
54680.02.092
63590.02.081
73950.02.061
85990.02.033

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 61.45 – 100000