{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3844, "q": 5.359, "mu": 1.96, "epsilonL": 5.987e-06, "Eth": 61.45}, "E_min": 61.45, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
61.45	0.0	
71.46	0.0001045	
83.1	0.0005501	
96.64	0.00165	
112.4	0.003931	
130.7	0.008237	
152.0	0.01586	
176.7	0.02864	
205.5	0.04902	
239.0	0.07978	
277.9	0.1234	
323.2	0.1812	
375.9	0.2523	
437.1	0.3335	
508.3	0.4203	
591.1	0.5081	
687.3	0.5936	
799.3	0.6752	
929.5	0.7526	
1081.0	0.8263	
1257.0	0.8971	
1462.0	0.9657	
1700.0	1.033	
1977.0	1.099	
2299.0	1.165	
2673.0	1.23	
3109.0	1.296	
3615.0	1.36	
4204.0	1.425	
4889.0	1.488	
5685.0	1.551	
6611.0	1.612	
7688.0	1.672	
8940.0	1.73	
10400.0	1.785	
12090.0	1.837	
14060.0	1.886	
16350.0	1.931	
19010.0	1.972	
22110.0	2.008	
25710.0	2.038	
29900.0	2.062	
34770.0	2.081	
40440.0	2.092	
47020.0	2.096	
54680.0	2.092	
63590.0	2.081	
73950.0	2.061	
85990.0	2.033	
-----