pwiDB

Plasma-Surface Interaction Data Set 170

Sputtering of Ar⁺ on Be(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Be(pc) at 300 K

angle = 0.0 deg	E /eV	P
	37.18	0.0
	43.68	0.0002087
	51.32	0.000788
	60.3	0.001933
	70.84	0.003973
	83.23	0.007408
	97.79	0.01297
	114.9	0.02168
	135.0	0.03493
	158.6	0.05443
	186.3	0.08216
	218.9	0.12
	257.2	0.1693
	302.2	0.2303
	355.0	0.3015
	417.1	0.3802
	490.0	0.4624
	575.7	0.5445
	676.4	0.6234
	794.7	0.6974
	933.7	0.7655
	1097.0	0.8279
	1289.0	0.8847
	1514.0	0.9367
	1779.0	0.9842
	2090.0	1.028
	2456.0	1.068
	2885.0	1.104
	3390.0	1.137
	3982.0	1.166
	4679.0	1.191
	5497.0	1.212
	6458.0	1.229
	7588.0	1.242
	8915.0	1.25
	10470.0	1.252
	12310.0	1.25
	14460.0	1.241
	16990.0	1.228
	19960.0	1.208
	23450.0	1.184
	27550.0	1.154
	32360.0	1.119
	38020.0	1.079
	44670.0	1.035
	52480.0	0.9886
	61660.0	0.9389
	72450.0	0.8873
	85120.0	0.8344

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.8082
q = 3.203
mu = 1.506
epsilonL = 2.714e-05
Eth = 37.18

Fit range

E = 37.18 – 100000