{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8082, "q": 3.203, "mu": 1.506, "epsilonL": 2.714e-05, "Eth": 37.18}, "E_min": 37.18, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
37.18	0.0	
43.68	0.0002087	
51.32	0.000788	
60.3	0.001933	
70.84	0.003973	
83.23	0.007408	
97.79	0.01297	
114.9	0.02168	
135.0	0.03493	
158.6	0.05443	
186.3	0.08216	
218.9	0.12	
257.2	0.1693	
302.2	0.2303	
355.0	0.3015	
417.1	0.3802	
490.0	0.4624	
575.7	0.5445	
676.4	0.6234	
794.7	0.6974	
933.7	0.7655	
1097.0	0.8279	
1289.0	0.8847	
1514.0	0.9367	
1779.0	0.9842	
2090.0	1.028	
2456.0	1.068	
2885.0	1.104	
3390.0	1.137	
3982.0	1.166	
4679.0	1.191	
5497.0	1.212	
6458.0	1.229	
7588.0	1.242	
8915.0	1.25	
10470.0	1.252	
12310.0	1.25	
14460.0	1.241	
16990.0	1.228	
19960.0	1.208	
23450.0	1.184	
27550.0	1.154	
32360.0	1.119	
38020.0	1.079	
44670.0	1.035	
52480.0	0.9886	
61660.0	0.9389	
72450.0	0.8873	
85120.0	0.8344	
-----